Paper Key : IRJ************494
Author: Ndokwu Tochukwu Anthony
Date Published: 06 Apr 2025
Abstract
ABSTRACTSemiconductor fabrication facilities are among the most capital-intensive industrial environments, where equipment uptime and process precision directly influence production yield, cost efficiency, and time-to-market. Given the high stakes, traditional maintenance approaches such as reactive or time-based strategies often fall short in balancing operational reliability with total cost of ownership. This study explores the application of Reliability-Centered Maintenance (RCM) as a strategic framework for optimizing life cycle costs (LCC) across critical equipment in semiconductor fabs. RCM focuses on maintaining system functionality by identifying failure modes, evaluating their consequences, and prescribing the most cost-effective maintenance strategiespreventive, predictive, or redesign-basedtailored to operational priorities. Using a combination of historical failure data, mean time between failures (MTBF), and failure mode effects and criticality analysis (FMECA), the study models cost impacts over the entire equipment life cycle. Key assets analyzed include photolithography steppers, plasma etchers, and deposition systems. The results demonstrate that RCM implementation reduces unscheduled downtime by up to 30%, while extending asset life and lowering spare parts inventory costs. Monte Carlo simulations and sensitivity analysis further validate the financial benefits of targeted interventions, particularly in systems with high redundancy and tight process tolerances. The paper also outlines an implementation roadmap integrating RCM within existing CMMS (Computerized Maintenance Management Systems) and condition monitoring infrastructure. This research provides semiconductor manufacturers with a pragmatic, data-driven approach to achieve operational excellence and cost control. By aligning maintenance practices with reliability goals, fabs can significantly enhance throughput, reduce lifecycle expenditures, and sustain competitive advantage in a fast-evolving industry.Keywords: Reliability-centered maintenance, Semiconductor fabrication, Life cycle cost, Predictive maintenance, Equipment reliability, FMECA
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